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PS-8 - Single to Multi channel gas detector A suction type detector for indoor use for detection of gas leaks in semiconductor factories. Sensor units are factory calibrated and delivered to site ready for use. Communication via 0-20mA, PoE, ModBus/TCP, ModBus-RTU. |
- Gas detection unit for semiconductor factories.
- Our proprietary hot wire semiconductor hydride sensor provides a long service life (coming soon).
- Large LCD which allows for easy onsite monitoring at a glance.
- PoE compatible for reduced wiring and seamless PLC connection.
- Front access for easy sensor replacement.
- Sub/expansion units allow for the combination of sensors based on the desired type and quantity of gas.
Detectable gases |
Full Scale |
Detection Principle | Model No. | |
---|---|---|---|---|
Silane |
SiH4 |
5 / 25ppm |
Electrochemical |
CDS-7 |
Phosphine |
PH3 |
1ppm |
Electrochemical | CDS-7 |
Diborane |
B2H6 |
500ppb |
Electrochemical | CDS-7 |
Arsine |
AsH3 |
250ppb |
Electrochemical | CDS-7 |
Hydrogen selenide |
H2Se |
250ppb |
Electrochemical | CDS-7 |
Disilane |
Si2H6 |
25ppm |
Electrochemical | CDS-7 |
Dichlorosilane |
SiH2Cl2 |
25ppm |
Electrochemical | CDS-7 |
Germane |
GeH4 |
1ppm |
Electrochemical | CDS-7 |
Ammonia |
NH3 |
100ppm |
Electrochemical | CDS-7 |
Hydrogen fluoride |
HF |
10ppm |
Electrochemical | CDS-7 |
Phosphorus trifluoride |
PF3 |
10ppm |
Electrochemical | CDS-7 |
Hydrogen chloride |
HCl |
5 / 25ppm |
Electrochemical | CDS-7 |
Hydrogen bromide |
HBr |
10ppm |
Electrochemical | CDS-7 |
Fluorine |
F2 |
5ppm |
Electrochemical | CDS-7 |
Dichlorine |
Cl2 |
5ppm |
Electrochemical | CDS-7 |
Chlorine trifluoride |
ClF3 |
1ppm |
Electrochemical | CDS-7 |
Ozone |
O3 |
1ppm |
Electrochemical | CDS-7 |
Carbon monixide |
CO |
250ppm |
Electrochemical | CDS-7 |
Hydrogen sulfide |
H2S |
50ppm |
Electrochemical | CDS-7 |
Nitrogen trifluoride |
NF3 |
100ppm |
Electrochemical with pyrolyzer |
CDS-7 |
Carbon tetrachloride |
CCl4 |
100ppm |
Electrochemical with pyrolyzer | CDS-7 |
Hydrogen |
H2 |
500 / 1000ppm |
Hot wire semiconductor |
CHS-7 |
Oxygen |
O2 |
25vol% |
Galvanic cell |
COS-7 |
*Please contact your representative for gases other than those listed.
Model | Main unit: PS-8N, PS-8M |
---|---|
Sub unit: PS-8S | |
Sensor Detection Principle | Electrochemical cell, Hot wire semiconductor, Galvanic cell |
Sampling Method | Pump suction type (approx. 0.5L/min ±20% automatic suction flow rate control) |
Target Gas | Set to user specifications |
Detection Range | Set to user specifications |
Display | Monochrome LCD full dot display |
Gas concentration: 5-digit display(with units) | |
Others: Gas name display, flow rate status indicator, alarm (1st and 2nd stage) status indicator, fault alarm display | |
*Not available for PS-8S. display on main unit | |
Alarm Set Value | Set to user specifications |
Alarm Accuracy | Combustible gas : ±25% of alarm set value (under equivalent conditions) |
Toxic gas : ±30% of alarm set value (under equivalent conditions) | |
Oxygen deficiency: ±1vol% (under equivalent conditions) | |
Alarm Delay | Combustible gas : within 30 seconds at 1.6 times the alarm set value |
Toxic gas : within 60 seconds at 1.6 times the alarm set value | |
Oxygen deficiency: within 5 seconds at 10 vol% until the concentration reaches 18 vol% (at 20±2°C) | |
(Excluding pipe length and communication time for all gases listed above) | |
Alarm Display | Gas alarm 1st stage: Alarm 1 LED (red) flashes, LCD screen display ALARM1 |
Gas alarm 2nd stage: Alarm 2 LED (red) flashes, LCD screen display ALARM2 | |
External Outputs | [Digital signal*1] |
・PS-8M: Ethernet 10BASE-T/100base-Tx(Modbus/TCP) | |
Modbus/TCP (Maximum number of connections depends on system configuration) | |
Maximum transmission distance 100m (up to HUB) | |
・PS-8N, PS-8S: None *PS-8N: RS485 (Modbus-RTU) when using the expansion unit MR module | |
[Gas concentration analogue signal*2] | |
・PS-8N, PS-8M: DC4-20mA (common negative terminal with power source) (output accuracy: within FS ±0.5%) | |
*0.6mA or less when a fault alarm indication occurs *300Ω or less including wiring resistance [Collective gas | |
alarm contact(1st and 2nd stage), collective fault alarm indication contact*3] | |
1a non-voltage contact/ automatic return | |
*Rated load: AC125V 0.5A or DC30V 1.0A (resistive load) | |
*Individual contact outputs require an expansion unit. | |
Explosion-proof Performance | Non-explosion-proof |
Operating Temperature and Humidity Range | 0℃ to 40℃ (given no sudden changes), 30 to 85% RH (given no condensation) |
Power Source | ・PS-8N: DC24V±10% |
・PS-8M: DC24V±10% or PoE (Power over Ethernet, IEEE 802.3at) | |
・PS-8S: Supplied from the main unit | |
power consumption*4 | CDS-7: 3.5W (max. 5.2W) |
CDS-7 (catalytic conversion type): 4.0W (maximum 5.9W) | |
COS-7: 3.5W (max. 5.2W) | |
CHS-7: 4.0W (max. 5.9W) | |
dimensions, mass | ・PS-8N, PS-8M: W70mm x H124mm x D172mm (excluding protrusions), approx. 850g (excluding sensor) |
・PS-8S: W70mm x H124mm x D172mm (excluding protrusions), approx. 770g (excluding sensor unit) |
*1 Only Ethernet or expansion unit Modbus-RTU can be used.
*2 The analog output of the main unit is for the main unit only. The analog output of the sensor equipped with the sub unit requires an expansion unit (AO module).
The expansion unit (AO module) can also output analog signals from the sensor mounted on the main unit, allowing multi-core connections.
*3 When installing two or more sensor using subunits and using individual contact outputs, use an expansion unit (DO module).
In this case, the individual outputs for the sensor mounted on the main unit are output from the expansion unit (the main unit's contact are a collective output).
*4 When analog output and digital output are used simultaneously, power consumption increases.
CE Declaration of Conformity