Nitrogen Trifluoride (NF3)
Standard range: 0 - 30 ppm
TLV level (TLV-TWA)
Relative density (compared to air):
- Nitrogen trifluoride is used in the plasma etching of silicon wafers
- Cleaning of the PECVD chambers in the production of LCD's (liquid-crystal displays) and silicon-based thin-film solar cells
Are you looking for a gas detection solution for Nitrogen Trifluoride?
New Cosmos offers a variety of Nitrogen Trifluoride gas detectors like the PS-7 and SH-WAD series of detectors