XPS-7 II semiconductor gas detector

The XPS-7 II suction type portable gas detector is a unique detector which enables you to switch easily between gases when needed.

The sensors are kept under power in a so-called sensor stocker. The stocker can keep up to 6 sensor cartridges. I case of an alarm in your cleanroom, take the sensor your need to approve that there is a real leak in your clean room.

The detector is battery powered and is portable.

 

The NEW XPS-7 II now also includes the detection of Nitrogen trifluoride (NF3)

 

For gas leak inspection and concentration measurement at semiconductor factory where there is toxic gas.

 

Features

  • Gas detector for semiconductor manufacturing gases, like Hydrogen Sulfide (H2S), Arsine (AsH3), Ammonia (NH3), Chlorine (Cl2), Nitrogen trifluoride (NF3), Silane (SiH4)etc.

  • Detects a range of gases with a Single-gas Detector by replacing the Sensor Unit

  • Easy to remove sensor unit and insert new sensor unit

  • Sensor stocker available for storage of maximum 6 sensors