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Home > Gas by name > Tetrafluorsilane (Silicon tetrafluoride, Silicon fluoride, Perfluorosilane)
Tetrafluorsilane (Silicon tetrafluoride, Silicon fluoride, Perfluorosilane)

Formula

SiF4


CAS nr.

7783-61-1


Measuring ranges

Standard range:  0 - 9 ppm


TLV level (TLV-TWA)

Not established


Relative density (compared to air):

3.59

 

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