XP-703III portable gas leak detector suction type ideal for detecting semiconductor gas leaks in your clean room. The detector detects hydrides and hydrogen. Easy to use gas leak detector which is perfect for tracing small gas leaks. |
Features
- Can detect trace amounts of various semiconductor manufacturing gases.
- Automatic stop pump function
- Automatic gas exhaust mode
- Equivalent to IP22 (in soft case)
Accessories
Soft case, Drain filter, Filter element, Gas probe, Dust filter, Hand strap,
2 x AA alkaline battery, Instruction manual
Gases
| Detectable gases | |
|---|---|
| arsine | AsH3 |
| diborane | B2H6 |
| dichlorosilane | SiH2Cl2 |
| hydrogen | H2 |
| phosphine | PH3 |
| R-407C | R407C |
| R-410A | R410A |
| semiconductor gases | |
Specifications / Approvals
| Model | XP-703DIII |
|---|---|
| Gas Detected | Hydrogen, Arsine, Diborane, Silane and Phosphine |
| Detection Principle | Hot wire semiconductor sensor |
| Sampling Method | Extractive |
| Detectable Leak Rate | H2: 5.07 x 10-7, AsH3: 2.53 x 10-7, B2H6: 1.01 x 10-7, SiH4: 2.53 x 10-7, PH3: 1.52 x 10-7 |
| Detectable Gas Concentration | H2: 1.0ppm, AsH3: 0.5ppm, B2H6: 0.2ppm, SiH4: 0.5ppm, PH3: 0.3ppm |
| Response Time | Within 10 seconds (for 300% of detectable gas concentration) |
| Power Supply | Size AA alkaline batteries x 2 |
| Battery Life*1 | Approx. 12 hours (with size AA alkaline batteries) |
| Degree of Protection | Equivalent to IP22 |
| Operating Pressure | Atmospheric pressure (800 to 1100 hPa) |
| Operating | 0 to +40°C |
| Temperature/Humidity | Less than 85%RH (with no condensation) |
| Dimensions | Approx. W38 x H130 x D32 mm (excluding protrusions) |
| Weight | Approx. 190g (including batteries and soft case) |
| Accessories | Soft case, Drain Filter, Replacement Filter, Gas Probe, Dust Filter, Hand Strap, Size AA Alkaline Battery x 2, etc. |
*1 It may vary based on the environmental conditions, operating conditions, storage time, battery manufacturer, etc.
CE Declaration of Conformity
